THEIA

R&D Scale Wafer Coating

200mm Research Equipment
Forge Nano’s Theia system is capable of ALD processing on single wafers from 75mm to 200mm sizes. Unique or irregular substrates are easily enabled with customization available upon request.

Performance

Forge Nano’s proprietary valving and pressure control enable short ALD steps at cycles less than 3 milliseconds. The dynamic valve manifold enables an unrivaled rapid research and prototyping system. Efficient valve and pressure operation also reduce precursor waste upwards of 40x.

CAPABILITIES

6 Metal Organic Precursor Sources
Hazardous Precursor Containment with Smoke Detection
Heated In-Situ Abatement System
Precursor Manifold Heating up to 200 °C
Precursor Source Chilling down 15 °C below Ambient
Substrate Heating up to 500 °C
Height Adjustable Substrate Holder
Automated Lift Pins and Single Wafer Handling
Foreline Pump or Customer Provided
Individual Pressure Control of all Manifold Inlets
Chamber Heating up to 200 °C
E95 Compliant HMI with data and alarm logging
3 Millisecond Fast Valve Actuation
Standard Turnkey Processes for Al2O3, TiO2, ZnO, and more!
External Outputs and Inputs for Facility Alarming
Base Vacuum 10^-4 Torr

SPECIFICATIONS

Heated Precursor Sources (up to 4)
In-Situ QCM Monitoring of Film Growth
On-Demand Ozone Generation and Integrated Destruct
Remote RF Plasma with 2 Forming Gas Inputs
Toxic Gas Enclosure and Manifold Line (For H2S or Similar)
External Hazardous Gas Sensors
100mm Substrate Chamber Height
Automated Load-Lock
Specialty Substrate Carriers (Designed Upon Request)
Glovebox Integration (via Load-Lock)

Ultra Fast Deposition With Forge Nano’s Patented SMFD-ALD™

Example Chemistries:

Al2O3, SiO2, AZO, TiO2, GaN, TiN, Bi2O3, Pt, Co, Cu, Ta2O5, Hf2O3, MLD

Example Applications:

Copper Barrier, ALD-Cap, Optical, Adhesion/Seeding, TCOs

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Ultra Fast Deposition With Forge Nano’s Patented SMFD-ALD™

Example Chemistries:

Example Applications:

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