
Performance
The system features a small footprint with minimal utility needs making it affordable and simple to install. The system is ideal for labs or research groups new to ALD or powder coatings.
Base Configuration
- 3 Vapor Draw Precursor Sources
- 200mL Reactor Volume
- Heating up to 200 °C
- Static and Continuous Dosing Options
- Automated Recipe Management, Data Logging, and Alarming via Remote HMI
Upgrades
- Up to 3 Bubbler Style Heated Precursor Sources
- Gaseous Chemical Inlets
- Mass Spectrometer
- On-Demand Ozone Generator and Integrated Destruct
- Volumetric Dosing Tank
- Custom Substrate Fixtures
- Quartz Crystal Microbalance
- Foreline Pump
- cGMP Compliance
Particle Atomic Layer Deposition Research

Chemistries:
Oxides, Metals, Nitrides
Applications:
Wide substrate ranges, excessively fluffy or difficult to fluidize powders, pellets/capsules/small objects, Pharma APIs