PROMETHEUS
Advanced R&D/Pilot Scale ALD
Lab and Pilot Scale Atomic Layer Deposition
The PROMETHEUS system is a fluidized bed reactor that provides our most cutting-edge research capabilities on a single, configurable machine. Forge Nano has installed PROMETHEUS in laboratories and universities all over the world. Forge Nano scientists run PROMETHEUS systems every day for our own in-house ALD research. The system features a variety of reactor sizes that enable research from 1g to 20kgs of material.
Performance
Lab-scale Atomic Layer Deposition has never been more attainable. We designed Prometheus to accelerate the understanding of Atomic Layer Deposition and develop its commercial applications. Prometheus is our lab-scale atomic layer deposition tool. Prometheus is built with scalability in mind, with multiple reactor sizes available, batch size is adjustable.
CAPABILITIES
- Substrates
- Powders (micron or larger spherical and rough)
- Nano-powders
- Extrudates
- Small objects
- Fibers
- Precursors
- Powders (micron or larger spherical and rough)
- Nano-powders
- Extrudates
- Small objects
- Fibers
SPECIFICATIONS
- Up to 4 Bubbler Style Heated Precursor Sources
- Up to 2 Additional Heated Vapor Draw Precursor Sources
- Gaseous Chemical Inlets Upon Request
- 1 – 5g Reactor Size
- 100 – 1000g Reactor Size
- > 1000g Reactor Sizes Upon Request
- Inert Substrate Handling
- On-Demand Ozone Generator and Integrated Destruct
- Mass Spectrometer
- “Gas Jet” Fluidization Assistance
Game Changing Innovation
Chemistries:
Oxides, Metals, Nitrides, Phosphates, MLD
Applications:
Catalyst, Thermal Filler, Pharma APIs, Battery Materials, Encapsulation
Share this document