Performance
Lab-scale Atomic Layer Deposition has never been more attainable. We designed Prometheus to accelerate the understanding of Atomic Layer Deposition and develop its commercial applications. Prometheus is our lab-scale atomic layer deposition tool. Prometheus is built with scalability in mind, with multiple reactor sizes available, batch size is adjustable.
Base Configuration
- 50 – 450 °C Reactor and Substrate Heating
- 50 – 200 °C Manifold Heating
- Two Heated Precursor Sources (up to 200 °C)
- Automated Recipe Management, Data Logging, and Alarming via Remote HMI
- 10 – 100g Substrate Capacity
- Mechanical Fluidization Assistance (Piston Impaction and Vibration)
- Integrated Dry Fore-line Pump and Inline Abatement
- Facility Alarm Inputs and Outputs
- Fully swept manifold design eliminating all dead-legs and clog points
- Automated Recipe Management, Data Logging, and Alarming via Remote HMI
Upgrades
- Up to 4 Bubbler Style Heated Precursor Sources
- Up to 2 Additional Heated Vapor Draw Precursor Sources
- Gaseous Chemical Inlets Upon Request
- 1 – 5g Reactor Size
- 100 – 1000g Reactor Size
- > 1000g Reactor Sizes Upon Request
- Inert Substrate Handling
- On-Demand Ozone Generator and Integrated Destruct
- Mass Spectrometer
- “Gas Jet” Fluidization Assistance
Game Changing Innovation
Chemistries:
Oxides, Metals, Nitrides, Phosphates, MLD
Applications:
Catalyst, Thermal Filler, Pharma APIs, Battery Materials, Encapsulation