PROMETHEUSAdvanced R&D/Pilot Scale ALD

Lab and Pilot Scale Atomic Layer Deposition
The PROMETHEUS system is a fluidized bed reactor that provides our most cutting-edge research capabilities on a single, configurable machine. Forge Nano has installed PROMETHEUS in laboratories and universities all over the world. Forge Nano scientists run PROMETHEUS systems every day for our own in-house ALD research. The system features a variety of reactor sizes that enable research from 1g to 20kgs of material.

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Lab-scale Atomic Layer Deposition has never been more attainable. We designed Prometheus to accelerate the understanding of Atomic Layer Deposition and develop its commercial applications. Prometheus is our lab-scale atomic layer deposition tool. Prometheus is built with scalability in mind, with multiple reactor sizes available, batch size is adjustable.

Base Configuration

  • 50 – 450 °C Reactor and Substrate Heating
  • 50 – 200 °C Manifold Heating
  • Two Heated Precursor Sources (up to 200 °C)
  • Automated Recipe Management, Data Logging, and Alarming via Remote HMI
  • 10 – 100g Substrate Capacity
  • Mechanical Fluidization Assistance (Piston Impaction and Vibration)
  • Integrated Dry Fore-line Pump and Inline Abatement
  • Facility Alarm Inputs and Outputs
  • Fully swept manifold design eliminating all dead-legs and clog points
  • Automated Recipe Management, Data Logging, and Alarming via Remote HMI


  • Up to 4 Bubbler Style Heated Precursor Sources
  • Up to 2 Additional Heated Vapor Draw Precursor Sources
  • Gaseous Chemical Inlets Upon Request
  • 1 – 5g Reactor Size
  • 100 – 1000g Reactor Size
  • > 1000g Reactor Sizes Upon Request
  • Inert Substrate Handling
  • On-Demand Ozone Generator and Integrated Destruct
  • Mass Spectrometer
  • “Gas Jet” Fluidization Assistance

Game Changing Innovation


Oxides, Metals, Nitrides, Phosphates, MLD


Catalyst, Thermal Filler, Pharma APIs, Battery Materials, Encapsulation

Download our brochure for more information, or contact us to speak to a surface engineering expert.