
Performance
The reactor can be sized specifically for the end-user’s application. Batch sizes can range from 10 – 1000kgs and substrates from nano-powders to pellets can be coated effectively. A chemical distribution manifold allows for agnostic vaporization of most precursor types which allows the user to refine chemistries with zero hardware modifications. Precursors may also be delivered through on-board gas cabinets or plumbed directly from an outdoor distribution zone.
Base Configuration
- 50 – 200 °C Manifold and Reactor Heating
- On-Board Precursor Cabinet with Fire and Loss-in-Weight Monitoring
- Facility Alarm Input and Outputs
- 100kg Reactor Capacity
- Mass Spectrometer
- Automated Recipe Management, Data Logging and Alarming via Remote HMI
- Integrated Dry Fore-line Pump and Inline Abatement
- Overhead Winch Loading
Upgrades
- Pneumatic or Mechanical Screw Loading
- Powder Pre-Heating Module
- Gas Pre-Heating Module
- Outdoor Precursor Feed Integration
- Reactor sizes for 250, 500, 750 and 1000kg capacities
Commercial Scale Rotary Batch Solutions
Chemistries:
Oxides, Nitrides
Applications:
• Pharmaceuticals • Energy Materials • Catalysts • Powdered Metals • Encapsulation • Modified Interfaces