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Technology
What is ALD
Scaleable ALD
ALD Services
ALD Equipment
Semiconductor Wafer Coating
THEIA – R&D Scale Wafer Coating
TEPHRA – Commercial Scale Wafer Coating
Powder Coating Equipment
PANDORA – Bench-top R&D Systems
PROMETHEUS – Advanced R&D / Pilot Scale
LITHOS – Medium to Large Scale Batch
Object Coating Equipment
ALD Research Equipment
Applications
Batteries
Semiconductors
Pharmaceuticals
Additive
Catalysts
Magnetics
About
About Forge Nano
Careers
Resources
News
White Papers
Application Notes
Case Studies
Contact
Contact Us
Equipment Support
“Pedestal 100mm Assembly Swop kit” has been added to your cart.
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Home
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TEPHRA
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Process Module
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Service Kits
/ Back Pressure Regulator Rebuild kit
Back Pressure Regulator Rebuild kit
$
207.62
In stock (can be backordered)
Back Pressure Regulator Rebuild kit quantity
Add to cart
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Back Pressure Regulator Rebuild kit
SKU
A-09434
Categories
Process Module
,
Service Kits
,
TEPHRA
