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Technology
What is ALD
Scaleable ALD
ALD Services
ALD Equipment
Semiconductor Wafer Coating
THEIA – R&D Scale Wafer Coating
TEPHRA – Commercial Scale Wafer Coating
Powder Coating Equipment
PANDORA – Bench-top R&D Systems
PROMETHEUS – Advanced R&D / Pilot Scale
LITHOS – Medium to Large Scale Batch
Object Coating Equipment
ALD Research Equipment
Applications
Batteries
Semiconductors
Pharmaceuticals
Additive
Catalysts
Magnetics
About
About Forge Nano
Careers
Resources
News
White Papers
Application Notes
Case Studies
Contact
Contact Us
Equipment Support
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Home
/
TEPHRA
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Process Module
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Service Kits
/ Abatement Replacement Kit
Abatement Replacement Kit
$
3,642.07
In stock (can be backordered)
Abatement Replacement Kit quantity
Add to cart
Related products
Lower Liner (Shield)
$
1,625.25
Add to cart
Pedestal 100mm Assembly Swop kit
$
10,791.69
Add to cart
Abatement Replacement Kit
SKU
A-09220
Categories
Process Module
,
Service Kits
,
TEPHRA
