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Technology
What is ALD
Scaleable ALD
ALD Services
ALD Equipment
Semiconductor Wafer Coating
THEIA – R&D Scale Wafer Coating
TEPHRA – Commercial Scale Wafer Coating
Powder Coating Equipment
PANDORA – Bench-top R&D Systems
PROMETHEUS – Advanced R&D / Pilot Scale
LITHOS – Medium to Large Scale Batch
Object Coating Equipment
ALD Research Equipment
Applications
Batteries
Semiconductors
Pharmaceuticals
Additive
Catalysts
Magnetics
About
About Forge Nano
Careers
Resources
News
White Papers
Application Notes
Case Studies
Contact
Contact Us
Equipment Support
Home
/
TEPHRA
/
Process Module
/
Chuck, Chamber, and PSV-Assembly
/ Lower Liner (Shield)
Lower Liner (Shield)
$
1,625.25
In stock (can be backordered)
Lower Liner (Shield) quantity
Add to cart
Related products
Upper Liner (Shield)
$
1,782.00
Add to cart
Lift Pin Baffle Liner
$
680.40
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Lower Liner (Shield)
SKU
A-07644
Categories
Chuck, Chamber, and PSV-Assembly
,
Process Module
,
TEPHRA
