PROMETHEUS

Advanced R&D/Pilot Scale ALD

Lab and Pilot Scale Atomic Layer Deposition
The PROMETHEUS system is a fluidized bed reactor that provides our most cutting-edge research capabilities on a single, configurable machine. Forge Nano has installed PROMETHEUS in laboratories and universities all over the world. Forge Nano scientists run PROMETHEUS systems every day for our own in-house ALD research. The system features a variety of reactor sizes that enable research from 1g to 20kgs of material.

Performance

Lab-scale Atomic Layer Deposition has never been more attainable. We designed Prometheus to accelerate the understanding of Atomic Layer Deposition and develop its commercial applications. Prometheus is our lab-scale atomic layer deposition tool. Prometheus is built with scalability in mind, with multiple reactor sizes available, batch size is adjustable.

CAPABILITIES

  • Substrates
    • Powders (micron or larger spherical and rough)
    • Nano-powders
    • Extrudates
    • Small objects
    • Fibers
  • Precursors
    • Powders (micron or larger spherical and rough)
    • Nano-powders
    • Extrudates
    • Small objects
    • Fibers
  •  

SPECIFICATIONS

  • Up to 4 Bubbler Style Heated Precursor Sources
  • Up to 2 Additional Heated Vapor Draw Precursor Sources
  • Gaseous Chemical Inlets Upon Request
  • 1 – 5g Reactor Size
  • 100 – 1000g Reactor Size
  • > 1000g Reactor Sizes Upon Request
  • Inert Substrate Handling
  • On-Demand Ozone Generator and Integrated Destruct
  • Mass Spectrometer
  • “Gas Jet” Fluidization Assistance

Game Changing Innovation

 
Chemistries:

Oxides, Metals, Nitrides, Phosphates, MLD

Applications:

Catalyst, Thermal Filler, Pharma APIs, Battery Materials, Encapsulation

Share this document

DOWNLOAD BROCHURE  

FLUIDIZED BED BROCHURE

LARGE BATCH BROCHURE