HELIOS is our commercial scale solution for atomic layer deposition of objects and high surface area substrates.
Performance: HELIOS is designed for efficiency with ‘zero-waste’ processing, substantially lower factory power consumption and small footprint. A patented integrated abatement ensures minimal maintenance and exceeds up times records of legacy CVD and PVD equipment.
Modular, simple and flexible, HELIOS coating systems deliver unmatched performance and productivity at a low cost of ownership. Pin-hole free, low stress and exceptionally conformal ALD films are available for the first time at sub-second cycle times and high productivity compatible with industrial applications requirements. Forge Nano’s patented SMFD-ALD™, delivers performance and productivity without sacrificing film quality.
Configuration: HELIOS accommodates parts with many different shapes and sizes with the combination of modular, parts-specific tooling and a generic loader. Standard chamber size from 1.5-80 liters or up to 1m X 1m panels (custom sizes available).
System and Components: HELIOS incorporates numerous proprietary innovative features and components that deliver optimal ALD performance with reliable, repeatable and safe operation.
An integrated ALD manifold with millisecond response integrates 10 of our patented Fast Pneumatic Valves (FPV) to deliver over 100 million trouble-free cycles of composite and nano-laminated ALD films. This manifold is the only ALD manifold that can switch composition every cycle without any throughput penalty. Field proven since 2005, our FPV valves set the records for speed, reliability, lifetime and safety, all while performing at temperatures as high as 220 C.
Capabilities: Cost-effective ALD of films including ZrO2, Al2O3, ZnO, ZnAlO, ZnBO, SiO2, TiO2, TiAlO, TiN, BN, Nb3N5 and more. Seamless and reproducible film engineering with nanolaminate and nanocomposite capabilities, adhesion in excess of 1000 PSI to many different substrates including tin, gold, copper, FR4, polyimides, many different solder mask materials, polyurethanes, ceramics, adhesives and more.
Download our brochure for more information, or CONTACT us to speak to a surface engineering expert.
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