ALD TOOL FOR 3D OBJECTS AND POROUS MATERIALS
Introducing ATHENA, an ALD tool designed specifically for high surface area object coating. ATHENA brings fast, efficient, and repeatable ALD directly to your lab. ATHENA offers optional glovebox integration for inert handling of materials.
ATHENA is an R&D scale tool for atomic layer deposition on objects and high surface area substrates.
High surface area objects coating, simple and efficient.
ATHENA’S cutting-edge design gives the flexibility and reliability your research projects deserve. With the ability to uniformly coat objects of various shapes and sizes, and inside pores. You’ll be publishing results in no time. Our custom tooling allows you to coat multiple objects at once, maximizing the system space and minimizing coating time by multiplexing substrates.
- Object coating
- Research and development
- Air sensitive materials
- Porous Objects
- High surface area materials
- Low particle environments
Optional glovebox integration available.