ATHENA | R&D Scale Object Coating

ALD TOOL FOR 3D OBJECTS AND POROUS MATERIALS

Introducing ATHENA, an ALD tool designed specifically for high surface area object coating. ATHENA brings fast, efficient, and repeatable ALD directly to your lab. ATHENA offers optional glovebox integration for inert handling of materials.

PERFORMANCE

High surface area objects coating, simple and efficient.

ATHENA’S cutting-edge design gives the flexibility and reliability your research projects deserve. With the ability to uniformly coat objects of various shapes and sizes, and inside pores. You’ll be publishing results in no time. Our custom tooling allows you to coat multiple objects at once, maximizing the system space and minimizing coating time by multiplexing substrates.

HIGH SURFACE OBJECT COATING

Design: ATHENA’S cutting-edge design gives the flexibility and reliability your research projects deserve. With the ability to uniformly coat objects of various shapes and sizes, and inside pores. You’ll be publishing results in no time. Our custom tooling allows you to coat multiple objects at once, maximizing the system space and minimizing coating time by multiplexing substrates.Add Ons: RGA, High Capacity Vaporization

Download our brochure for more information, or CONTACT us to speak to a surface engineering expert.

ATHENA BROCHURE