Roll-to-roll ALD for Lithium-ion Batteries
ALD films can be used to improve the Lithium-ion battery performance significantly. Roll-to-roll ALD is an industrial high throughput method to produce these highly conformal ALD films on flexible substrates. This makes roll-to-roll ALD attractive method for manufacturing of Lithium-ion battery materials. In this presentation we give a short introduction to Beneq WCS 600 roll-to-roll ALD platform and equipment performance.