Particle Atomic Layer Deposition:
Particle Functionalization by ALD: Early Years & Barriers to Commercial Interest
Session Notes:
PRESENTER
Professor Alan Weimer, Ph.D., P.E
Professor of Chemical and Biological Engineering at the University of Colorado
0:00:10 particle ldiot. See you and also the barriers to commercial interest. So just some background on me. 0:00:21 I'm showing on the screen faculty member because I spent 16 years in industry with the Dow Chemical 0:00:26 Company. Uh, where I quote here today, but I know that there was a real powder technology training. 0:00:34 All of my professional career has been with particles either making particles or or functional izing 0:00:41 particles modifying their surfaces or taking particles and fabricating components. And here what you 0:00:50 see is a photograph of me many years ago standing beside a commercial reactor being constructed. 0:01:02 This is a graphite transport to and basically what happens in here. The system runs it about 2000 0:01:08 Celsius, and you have mixtures of carbon, black and metal oxides that react together by Krever 0:01:15 Thermal reduction that form ultra fight sub micron size known oxide ceramic particles was our 0:01:22 objective. So this is really this is the only thing I ever did. A dad actually made money. Otherwise, 0:01:29 for about 90% of my time, I wasted all their money for this. Everything kind of came together. The 0:01:34 business, the technology markets were their a great group of people and was able to take us from a 0:01:42 century of laboratory curiosity to a commercial facility in about about eight years. As you can see, 0:01:49 I spent 16 years at if you receive Colorado. So this is a photograph of the first commercial plan. 0:01:59 It produced 600 metric tons a year of tungsten carbide powder, something like run power. It was used 0:02:05 to make micro grills. The key to this process was that this particular powder was smaller sized than 0:02:14 anything else that could be made at that time. Other materials were made by hydrogen reduction ended 0:02:20 up with larger grain sizes in the fire of the green, the sharper the bits on the micro drills, the 0:02:27 harder the parts and the final, the particle size them Or could ball you could add for a comfortable 0:02:32 carbide COBOL hard metal end up with with fabricator devices that were both hard and and tough. This 0:02:41 process was sold to Sandvik, largest producer of cutting schools in the world back in the late 0:02:46 nineties. They then scale this process up about three times the size and build a plant in England 0:02:56 core Ahmad. And at that time, when this was sold, the majority of micro girls used throughout the 0:03:03 world were produced from this process called Rapid Carver Thermal reduction. I'm not sure what is 0:03:09 happening today. It was very secretive with that particular So in 1996 I then came to see you and I 0:03:18 have have been here ever since. On one of the urine is that you work in is particle Atomic layer 0:03:25 Deposition. Here is a photograph of the four co founders of Alien and Solutions in 2001. Here you 0:03:34 see Steve George on the right. When I first came to see you, I heard Steve give it outstanding 0:03:40 presentation of the LD chemistry. And I was just amazed at the chemistry. And I asked him, Has 0:03:46 anybody ever tried to Kota particle and responsible? I don't know. I don't put a film on a particle. 0:03:52 I don't think so. And so we teamed up, and that was our objective. Karen Weekly was a postdoc in my 0:03:59 lab. She agreed to spend time turning the company off the ground. And this guy here, Mike Masterson, 0:04:07 was our angel investor. He was a CEO of A L Banana for a long time. Many, many years, and he was 0:04:14 actually my office mate in grad school at the University of Colorado. So I got my PhD and see you. 0:04:22 And then I guess that they figured I was decontaminated by Dow Chemical. And so I could come back in 0:04:30 January of this year. I'll be Nana Solutions and Forge Nano merged to create the bigger and better 0:04:37 for Jun'an Oh, which is really the ultimate manufacturer of code of powder coated particles by 0:04:46 Atomic layer deposition. The other thing for sure that you have to know and anybody NLD knows this, 0:04:54 uh, Dr Santa Ola received the 2018 Millennium Technology Prize. That doesn't happen unless the 0:05:03 technology is absolutely outstanding. He is economy acknowledged inventor of L D. This U S path 0:05:10 method for producing compound Finn films and Rica submitted his nomination. Um, he received an award. 0:05:19 So the point I want to make it a L. D is definitely some pretty outstanding well recognized 0:05:25 technology particular in the area flats and semiconductors and solar panels and electronic devices. 0:05:33 And we're going to talk about today is the application of avail Devi's thin films to so one of the 0:05:41 things that I want to make sure identify correctly is the particle lt definition that I have because 0:05:49 it may be different from in general. So here on the left you see particles that were coated with 0:05:58 metal ad Adams in this case, platinum. You cooked the internal surfaces of those particles as well. 0:06:05 I've done the right. You see particles and have a thin film on them. Um, the original work with with 0:06:14 putting nano metal decorations on particles for catalyst was that in Finland, here are a number of 0:06:20 the to the early papers. There are a number of other ones as well, and the point I want to make is 0:06:26 that that is not the focus of this talk were really the focus of my workers. My definition of a 0:06:32 particle ale de what I'm interested in is being able to put these films on particles and without 0:06:41 including the particles together Nana glom, aerated films, the definition here, the focus primary 0:06:48 particles could with non particular ale de films. The particles are not agglomeration, meaning 0:06:54 they're not glued together. You don't see cripple junctions here that particles are not being good 0:06:58 together. You also don't see poorest films, which would result if, in fact, you have fine particles 0:07:05 such as you get by chemical vapour deposition. They would end up being scavenged on the surface of 0:07:11 that particular particle. And in order to confirm and verify that you do indeed have primary 0:07:18 particles coated, you have to do more than just t e. And we definitely need high resolution tm. But 0:07:25 you also need ball characterization of these particular materials. For example, surface area has a 0:07:32 surface area changed. Obviously, if you were to for next among these particles of surface area would 0:07:37 be less than what you had calculating if they're if they're all covered individually. You can also 0:07:44 tell by particle size distribution analysis before and after. If that distribution widens out, if 0:07:51 you basically have formed a Guam rinse and then other methods for the chemistry surface. Functional 0:07:57 groups looking at FDR in XPS all of these together before and after LD In order to confirm that in 0:08:05 fact, you have coded primary particles and they're all coated. So if you look at CVD, the precursor 0:08:12 veil, be if you want to form aluminum oxide by chemical vapour. Deposition. You react. Try meth 0:08:19 aluminum tm A with water vapor. And the challenge here is that you inherently will form particles in 0:08:28 the gas phase on. Those particles will then be scavenged on the surface and you'll end up with a 0:08:34 film that is porous. And so here are some examples of that I like this paper published in 2006 0:08:42 because it was done in the food I spent reactor here on the left hand side, you see liquid face CVD 0:08:48 very thick films 1500 enemy. As you can see the poorest feeling the particles were basically 0:08:54 scavenged on the service. You would have examination from the substrate particle, and here we show 0:09:01 gasping CVD. This is a 200 nanometer thick film and you can also see the pores on that particular 0:09:09 particle surface in that particular film again, the result of particles that are formed in the gas 0:09:15 phase better than scavenged on the surface of the film, I would note that you can get CVD to be a 0:09:21 lot better than this. This happens to be the the Micrografx from showing based upon the food I bet 0:09:27 great actor process, which is similar to what we do for for a Ah, I'm sure Steve has already run 0:09:34 through the fundamentals of the chemistry. But just as a review here as relates to what I will be 0:09:40 saying, you have a surfaced with typically oxide or metal or could be something else, and you're 0:09:49 typically gonna have hydroxy groups in that surface. If it's a nitrate, they could be sort of like 0:09:54 amino type groups and then to carry out the first a reaction. You have dysfunctional hydroxy groups. 0:10:02 You bring in T m A and you convert those hydroxy groups that metal groups you convert him all. And 0:10:12 once they are all reacted, there's no further reaction occurs. It's self limiting surface chemistry. 0:10:18 You then have a new surface with methyl groups. You bring in the water vapor. You convert those 0:10:24 metal Bruce back the hydroxy groups, and in that process, he put that in one sub 71 a layer of 0:10:31 aluminum oxide. And then you basically repeat these steps curating out the baby reaction sequence in 0:10:37 order to grow the film. 0:10:40 So we eliminate the scavenging. We grow films on primary particles of tackling and together Here is 0:10:50 a very nice Micrografx. John Ferguson, his work published to pass it to you. Here he's showing Born 0:10:57 Night cried fields on the surface of zirconium oxide particles. You can see, of course, the atomic 0:11:03 structure of zirconia. Zirconium, oxygen zirconium option is black and white lines. What is 0:11:08 particularly impressive is the fact that every single primary nanoparticle eyes could have with the 0:11:15 25 Angstrom Fillol born. I cried without gluing of particles together, and that is a very, very 0:11:21 significant finding. In fact, you could cut primary particles about going together as a particle 0:11:27 person my entire life. When I saw this initially in some of our Micrografx size, totally amazed that 0:11:33 you could actually pull this pool is. And of course, that was shown by AM Dylan and others carrying 0:11:41 out multiple a bi cycle theory of 3000 B cycles, you can achieve very, very linear in growth rate 0:11:50 viewer of 1.29 anxious per cycle. Here you're looking at a surface roughest of only four. Angst 0:11:56 comes for a film thickness. It is 3860 Angstrom. Pretty, pretty amazing what you could do with with 0:12:03 a L. D. So the idea is, can we do this on a particle and really work focused on a number of 0:12:10 different materials? We looked at Warren. I tried the application. Here was these boring maker as a 0:12:16 thermal filler. It's also insulate er elect chronically, it doesn't conduct. Electricity is used as 0:12:23 a pillar to increase normal conductivity for electronic packages. The problem is that the born night 0:12:30 right there is that there's a limit in its loading into a resin that is used to essentially glue a 0:12:40 chip onto a substrate. Um, and if the viscosity goes up, there's a drop that comes out of a syringe, 0:12:48 and that drop it doesn't flow over the chip to the substrate. And so it's really critical to have a 0:12:54 viscosity that meets the conditions that is gonna be floatable is going to contain enough of the 0:12:59 filler in this case Born. I try to be able to also improved thermal conductivity of that of that 0:13:05 plastic package. We also had a lot of interest in iron particles trying to put barriers that on iron 0:13:12 to prevent oxidation. That application was for still stealth aircraft. Basically, could you prevent 0:13:21 the oxidation of iron without changing the particle size. We had interest in being able to 0:13:26 demonstrate that we could coat polymer particles without gluing them together. So I have some work 0:13:32 to show you here on polyethylene early work. We also did some like earlier deposition films. These 0:13:40 could then be oxidized because the MLB it produces an alley, Kona has an organic component and 0:13:47 organic component. You could remove the organic component and produce a very high surface area film 0:13:53 on a surface. And we also wanted to demonstrate that we could coat the internal pores within hype 0:14:02 ferocity, maybe 85% poorest polymer particles. So if we look at the board and they cried first again, 0:14:12 it has really high thermal conductivity there, used to enhance heat conduction boring Laker is 0:14:18 fairly inert. What I show here in this graph I za silica thickness and angst rooms and how that 0:14:25 relates, theoretically, to the thermal conductivity of a reborn night cry. Players have silica 0:14:31 coating both sides of it, and the idea here is to increase the born nitrite particle concentration. 0:14:39 The company that funded this work was selling Bora nitrite, and they wanted able to increase the 0:14:45 amount of born nightmare that could be letter that they could basically sell MAWR material to the 0:14:50 user. The problem. Waas that the night Cried did not interact well with the coupling agent for the 0:14:59 poxy. And could we could we make that for a night look like an oxide? But do that? We had to make 0:15:07 sure that that film was extremely thin because of thicker. You make the film the lower the thermal 0:15:14 conductivity defective thermal conductivity in that particular system. You also have percolation 0:15:20 issues, but the focus at that time to make the nitrite surface look like an oxide bond with the 0:15:30 coupling agents to reduce the viscosity and maintain thermal conductivity was to have film with her 0:15:37 lesson about one Nanami, or thickness, because the thermal conductivity decreased by about 50% for a 0:15:45 one nanometer film. So the focus of early research back in the early two thousands was for Oprah 0:15:52 Thin films. Born nitrate was a key material because of its thermal conductivity and the fact that 0:15:59 was electric. So there's a challenge in making these offer thin films and Riga her paper, this paper 0:16:09 incited probably now about 1500 times and what she stated there was. In fact, the original first 0:16:19 cycle is going to coat the surface of the substrate. It's not gonna coat it all. It's gonna take a 0:16:27 number of avail de cycles where you are coating basically the substrate and the coating material 0:16:33 until you get to a point based upon the growth rate and the chemistry that you will finally be 0:16:40 growing only on the surface of the NLD. Grow material and great persons recently developed a model 0:16:47 which basically shows this where in fact you laid out your nuclear. You gradually grow this film and 0:16:55 so depending upon the surface chemistries that are involved here, it would take a number of cycles 0:17:01 in order to basically put down that film across the particle service. This suggests that that these 0:17:09 particles and films their semi continuous and you have known uniforms field roof. So if we look at 0:17:16 the work that John Ferguson reporter back in 2000 um, for for born nitrite, what he shows here is it 0:17:25 takes about eight a l D cycles in order to initiate the alumina growth on the entire border nitrite 0:17:32 surface. So here we're looking at about eight cycles in order to start growing aluminum oxide across 0:17:40 surface. Here is Ah Micrografx of the Code of Born. I tried note that the edges and the basil planes 0:17:50 are coated with aluminum oxide, and a reason for that is that tm a behaves like a lewis acid. You 0:17:57 have functional groups on the edges that you can react by atomic later deposition. The basil planes 0:18:02 only have an electron pair this active for Lewis acid. So basically, because of PM a behaving like a 0:18:09 loser, Lewis acid is possible for alumina to basically closed the entire born A crime, however, get 0:18:18 silica is desired as the coating for the outer surface. Silicon tetrachloride will not behave like a 0:18:25 Lewis acid, and in fact, you can see here that you can coat the functional groups on the edges very 0:18:31 nicely, but that the basil planes you end up with patchy coatings. And in fact, it's possible to 0:18:40 have films that are not uniform on the basil planes. But our uniform is, and here we show the 0:18:48 results of this were indeed, by coating the border nitrate particles weekend, we can decrease the 0:18:53 Scots and the It's also possible to make particles here where you put that aluminum oxide first in 0:19:01 order to create a bonding layer and then you can put the silica on on top of that, what about the 0:19:10 iron? So you were looking at at five micron iron particles, And again, the objective is to provide a 0:19:16 a barrier to oxidation to the iron particles Here were showing results of a thermo gravimetric 0:19:23 analysis as temperature has increased up to 265 degrees Celsius for various codings of aluminum 0:19:32 oxide on on the iron particles. And here is the onion could've material. You can see it oxidizes 0:19:39 picks up. Wait. When you do 10 a. L d cycles those particular particles were the film was about 1.3 0:19:47 nanometers. Based upon the growth rate, you concede it oxidizes almost the same as the uncut of 0:19:52 material behaves very similar that, however, when you now go to 25 cycles or 50 or 100 they're all 0:20:00 essentially the same. About a 2.5 nanometer film protects against oxidation is there is a 0:20:06 substantial difference between this real much only 1.3 nana meters, and that's really what's about 0:20:12 2.5 substantially different properties to Nana Miers appears to be about the key film. Thickness 0:20:22 again identified back in early two thousands that the properties of those particular materials were 0:20:28 substantially different based deployment thickness of those films and I think do it particularly the 0:20:34 fact that it takes a number of cycles in order to, um in order to cover that surface and then 0:20:41 effectively provide a very We also were interested in coding polymer particles here you're looking 0:20:50 at at polyethylene 33 micron polyethylene particles with films of aluminum oxide grown at 77 degrees 0:20:58 Celsius. And what you see is that you don't have triple junctions here. Basically, you could do this 0:21:03 without aggregating. The particles are over high density polyethylene, the uncoated polymer, as well 0:21:12 as after 75 tm a water cycles. They grow aluminum oxide again, not showing any on. So the question 0:21:21 was for us was, How is this actually able to be accomplished? Because there are no functional groups 0:21:28 on the surface of the high density polyethylene. But there are pours present, and here you can see a 0:21:34 50 cm. You can see the aluminum oxide on the surface and you can also see some aluminum oxide. It 0:21:41 looks like it's inside. The proposed ailed film growth mechanism John Ferguson came up with was that 0:21:50 essentially you have TME and water going into the pores, diffusing into the pores. And eventually 0:21:57 aluminum oxide grows a grows within the poor and outside of the poor, and that eventually you 0:22:02 basically grow, um, aluminum oxide on top of aluminum oxide. So you essentially have a physical type 0:22:10 of mechanism for bonding. Theologian Mina to those Palmer surfaces that don't have particles, I 0:22:18 couldn't look identical 85% ferocity and do a cross section on these particles coated. And this is 0:22:26 what the inside looks like. If we do E. T s math and you can see the aluminum deposit within the 0:22:33 pores of that particular, if we look more closely on the left hand side here in this particular 0:22:40 image, the aluminum oxide is bright on the right hand side. The aluminum oxide is dark. Here, you 0:22:46 can see a poor, Here's the polymer, and here's the aluminum oxide feel on the pope. It's also 0:22:54 possible to do molecular earlier deposition on on substrates and here we're looking at spherical 0:23:04 silica particles made by the Stober process. And in this process we are basically being able to 0:23:14 create aluminum Alcock side film with value cone in this particular system using F ling glycol in 0:23:22 place of water. So tm ethylene glycol to grow in this particular film. And here you can see about a 0:23:30 seven Nana meter film on the outside of this particular case, a t i 02 particle. 0:23:38 Now when you take that value cone and you can all sign it and here we're looking at in calcite at 0:23:46 four degrees C. In the presence of here that 25 enemy or thick film it shrinks. It's now about a 0:23:53 centimeter sick, but it's extremely porous. And now we have about 1250 meters squared per gram 0:24:00 poorest film fabricated from aluminum Alcock side run film, which is then Cal signed to remove the 0:24:09 carbon. In fact, it's possible to control the size of the pores that are generated in this poorest 0:24:15 film by controlling the Sally Kohn to begin with, and I think essentially the length of the carbon 0:24:22 carbon bonds in that particular. So how is this done at larger scale so the original work was done 0:24:32 with a tungsten grand pressing particles into a tungsten grid passed on, and I are being through 0:24:38 doing FDR analysis surface chemistry. However, in a fluid eyes bed reactor, it's possible to have 0:24:45 many, many particles high surface area inside a crude ice bed reactor. And because of that surface 0:24:53 area, you can follow the surface chemistry with external mass spectrometer. I shouldn't here. Ah, 0:24:59 stir as possible. Use a stir and a small system. It's possible to actually vibrate this entire 0:25:06 reactor chamber or, most likeliest, possible to pulse the gases in order to be able to overcome any 0:25:15 kinds of inner particle forces that may initially form, say, from Vander Waals forces of opera fine 0:25:21 particles within that particular system. I also want to note that you can make giant fluid eyes, 0:25:27 bids FCC and basically all the gasoline producing over cracking down on the hydrocarbon industry is 0:25:34 using giant fluid ice bed reactors that might be 40 you know, 50 feet in diameter. Um, yeah, 0:25:41 absolutely Giant. Most of the polyethylene grown in the world has grown and huge food, I bet 0:25:47 reactors, my gas based politicalization. So food I spend reactors very familiar with. I worked with 0:25:54 them all my life. I believe they are easily scaled up. Uh, for So what are the barriers to 0:26:01 commercial acceptance? Well, two in particular. One was that, um, scientists at the time particle 0:26:10 experts it would have 10 particle conferences were unwilling to believe that you could coat primary 0:26:17 particles by atomic layer deposition without gluing them together. This was a slate as as 2000. For 0:26:26 5 4006 I attended a conference put on by the International Fine Particle Research is to to free Um, 0:26:36 I was an invited speaker in Santa Barbara, California. I gave a talk in early talk on on a L. D. And 0:26:43 was just totally blasted. There was a particle expert there from Europe, well recognized, one of the 0:26:49 best in the world. And he just totally blasted being his conferences, that that's impossible. There 0:26:55 is no way that you can coat individual particles that gluing them together because of Andrew Walls 0:27:01 forces. And so it was clear to me that we had to prove that this was possible because people 78 0:27:08 years after we started doing this work still couldn't believe that you could cut primary particles 0:27:14 by L. D. In this particular manner, I would like to say that I saw this person give a plenary talk 0:27:24 three years later at the party conference in Nuremberg, Germany, and he talked about how great 0:27:30 particle a L. D. Was. And they went up afterwards and I asked him, I said What? You blasted me three 0:27:35 years ago in California. We're talking about this being a fantastic process and he said, Hey, it 0:27:42 took time to sink in. So he became a believer also in what I call particle Ale de. We're gonna talk 0:27:50 more about this and how we can basically prove that you could cook primary particles. The second 0:27:56 period of commercial acceptance, which still present today, Um, for some companies is the fact that 0:28:04 they can't believe that particle oil be is a low cost process with improved cost performance 0:28:09 benefits. So we're gonna talk about two of these aspects as well. So what we did is we took a number 0:28:17 of nanoparticles, Laconia fumed, silica and tight Titania particle size roughly 25 to 40 an animator 0:28:26 surface area around 50 meters square program. We coated those particles by atomic layer deposition 0:28:32 with different thicknesses. We then did high resolution microscopy. I look at the surface is where 0:28:39 they're crippled. Junctions reduce Carter particles primarily coated. However, you can tell just by 0:28:44 looking at a high resolution tm you need the high resolution TM, but it's only looking at a very 0:28:52 small smidgen of the actual sample. So you also need bulk analyses. You need surface area and 0:28:58 particle size distribution of those particular particles were being coated. And then methods also 0:29:06 like FP, our and XPS to be able to also evaluate the bulk chemistry of. So these air the code, the 0:29:15 particles that we started with noticed after, made inflaming, accurate. It's if somebody's particles 0:29:20 are automatically aggregated, you're not gonna break up the aggregates. But the idea is not the coat 0:29:27 the particle aggregated. And here are some of Lisa Kim's work with with fumed silica, different 0:29:37 degrees of magnification noticed that you don't see cripple junctions here. Basically, you have 0:29:43 coatings and all these particles, but you're not gluing the particles together. And in fact, if we 0:29:48 do a higher resolution, look at this. Every particle looks the same. A 5.2 nanometer film on every 0:29:55 one of those particles and people just amazed that in fact, you can. You can pull this off here, we 0:30:03 seize, or Cody and nanoparticles could it with silica. And here we see zirconia nanoparticles could 0:30:11 with titanium dioxide. So basically different systems before I should were nitride films a lot of 0:30:18 different variation to the substrate in the particle surface. It's also possible to design and 0:30:26 fabricate particles with multiple films. Here you're looking at a particle that has three different 0:30:32 coatings on it. 0:30:35 So to look more at the bulk, here's a result of alumina coated silica P i R. Here you can see the 0:30:42 absorbent spectra. Here's the aluminum oxide, um, absorbing spectra and you can see the ball alumina 0:30:51 feature. Uh, the uncoated silica does not have the bulk alumina feature. However, after 20 and 50 0:30:59 cycles, you can see the bulk alumina growing on. You were looking at XPS, and what you noticed is 0:31:07 that we have attenuated the silicon and silica dioxide, pinks, aluminum peaks or presence of 0:31:14 basically we're coding now. Have we have we glue them together? No, the data would say we have not. 0:31:22 Here's a particle size distribution before and after. In fact, if we had Cody's particles ust a 0:31:29 broadening of this distribution, we don't see that indicating is based upon a particle size 0:31:34 distribution. We have not Cody's particles that could articles and surface. Syria tells us the same 0:31:40 thing. Here you're looking at a theoretical 25 5100 Nana Meter film thickness on films and here, 0:31:53 particle size. I'm sorry, film thicknesses and the surface area is predicted, and then you see the 0:31:59 experimental results, and basically the predicted surface area is in line. The experiment was in 0:32:07 line with the predicted surface area, So surface area particle size distribution in line indicating 0:32:15 no next high resolution indicating no next fpr XPS indicating, in fact, the bulk surface are all 0:32:23 covered. So how could you do that? How can you pull that off? That was really a question for us. We 0:32:31 looked more in detail like a food ization behavior. Fine particles on the left. Here you see 150 0:32:39 micron diameter nickel particles a lewd eyes. Individually, they're obviously can be coded 0:32:45 separately on the right. These are seven or 13 micron diameter, boring nitrate particles. There's a 0:32:51 341 Mike Run bar noticed at these particles fluid eyes as dynamic aggregates. So what happens in the 0:32:59 food eyes? Bed is the particles air effectively larger and they stay in the bed even though you may 0:33:05 have nano particles, Um, show in seven or 13 micron for a night right here I'm showing nano 0:33:12 particles. EULEX 50 fumed silica and they will basically fluid eyes as aggregates. Here in the head 0:33:18 space, you have an aggregate of silica fume silica fluid izing of those aggregates will shed 0:33:27 particles and then other agg ress will pick them up. And so we have named this dynamic aggregation 0:33:34 where ultra fine nanoparticles will fluid eyes is effectively larger particles on the order of maybe 0:33:40 500 microns. They stay in the fluid ice bed, they don't get carried out, and in that process is they 0:33:46 move. Besides other aggregates, they shed particles from one aggregate go to Teoh to to the other 0:33:52 aggregate. But in fact, all of those particles are code Exactly the same for those here you're 0:33:58 seeing at five point thine enemy or film of aluminum oxide on the surface of the fumes. 0:34:08 What about the cost What could we do here to take a look at the cost that indicated this is Lou cost 0:34:15 process. So in this case, we ran a large fluid eyes bed six inches in diameter, 12 inches tall, 0:34:24 Curia atomic clear deposition at 350 I degrees at 77 degrees Celsius. One tour pressure and, in fact, 0:34:37 thes five micron iron particles. About 12 kilograms of material. Total surface area, 1200 meters 0:34:45 square. We carried out 22 cycles to put a 2.5 anatomy or film of alumina on the outside of his iron 0:34:53 particles. Basically, we know from the prior TG a work that a 2.5 man Amir film will provide a 0:34:59 substantial oxidation barrier. What always amazes people is that to pull this off on a kilogram of 0:35:07 composite, you have to lay down 1.4 grams of aluminum perfectly. And of course, anybody in a 0:35:14 particle ale The space knows of Dad is a piece of we do with the fluid eyes bid. And because of the 0:35:21 surface area and the reactor, we can follow the surface chemistry. So here, what you're seeing is a 0:35:27 signal from the men from the downstream mass spectrometer. In this particular case, uh, this 0:35:33 obviously the signal is a log arrhythmic scale. The red here is T M A. Um, you're in the noise down 0:35:42 in this. In this location of the signal, you're in the noise. We then start the first dosa tm a dose 0:35:51 aluminum hydroxide, the hydroxide surfaces reacting with the PM, a dose starts here. We're looking 0:36:00 for methane. You see the method for its receding in the mass spectrometer? It isn't until all of the 0:36:09 surface punctual groups are converted methyl groups that all of a sudden we see tm a breakthrough in 0:36:16 the mass spec and the same thing with the second step here we start the water dose. You can see tm a 0:36:25 being form and it isn't until the methane starts to drop that we see breakthrough of the water vapor. 0:36:35 So the indication here is that we can get near 100% effective use of gases on essentially not waste 0:36:44 gases. Yet remember, you can have hundreds of thousands millions of square meters of surface area 0:36:50 food, eyes, bed and the surface of the inside of the bed is minute like it's nothing compared to 0:36:59 surface area on the particles. So if you look at that in terms of a cost analysis, if we want to 0:37:05 make 100,000 kilograms of this composite, these five micron iron particles with A with a film of 0:37:12 aluminum oxide for a 2.5 Nanami or film and the precursor costing, say, $350 a kilogram. It costs 0:37:21 about $50,000 to coat and make 100,000 kilograms of that composite. However, if we have to make a 0:37:28 thicker feeling, the compensate for porous coating, such as you would get in C v D. I pick here the 0:37:34 200 nanometer film because that's what I showed made in a fluid eyes. Bad in one of those early 0:37:39 slides. The cost of that coating is about $4 million. So this difference between $50,000.4 million 0:37:46 dollars is really this cost savings. To be able to put down a perfect, uh, echoing barrier by atomic 0:37:56 layer deposition the path forward Um, what I want to indicate here is the interesting in particle 0:38:06 will be over time. Here I'm showing that between 1999 2000 and 19. We've grown from only a few 0:38:14 citations, a few papers to a roughly 30,000 total citations today. And what you couldn't see is we 0:38:24 have over 5000 citations a year, Basically, exponential growth. Uh, these are our citation numbers 0:38:31 from the rebel science where we we combined the term particle and in quote patients, atomic layer 0:38:38 deposition. So there's a huge amount of interest in particle ale de from the early work back in the 0:38:45 very late nineties. With that, I want to conclude I get Teoh give this nice talk, but the work is 0:38:54 actually being done by my graduate students and postdocs. I have outstanding PhD students, and I 0:39:01 really want to thank them for being three. The doers in all of this work that we've done over over 0:39:10 time, thank you very much, and I'll be happy to take questions. One. This