0:00:00   Yeah hi everyone. My name is Jonas Sundqvist and I'm with Techcet in san Diego California and I'm very
0:00:10   honored to be invited to take part in the A. C. Event again this year 2021. So this time around I
0:00:18   will give you all a briefing on electronic gases and C. B. D. And L. D. Precursors that are used in
0:00:26   the semiconductor industry. So first let's take a look at the semiconductor industry development and
0:00:34   forecast for 2021. So I think when the pandemic came became a reality more than a year ago most
0:00:43   people thought that semiconductor industry as other industries would go down. Initially it happened
0:00:49   but it recovered quite good. So driven by people are being forced to work from home doing schooling
0:00:57   from home, enjoying life from home by using much more streaming media and social media of course. So
0:01:05   everybody has updated their phones new laptops and use much more Internet traffic today. And this
0:01:13   has been a boost for the semiconductor industry as a whole. And now coming out of the pandemic the
0:01:21   industry is very interested in. And also we as uh coming out out of the pandemic and get back to
0:01:28   normal again. So there's a big ramp up of production in fabs, new facts are being built, new caps
0:01:36   are being planned and this drives the whole semiconductor industry forward. Uh So if you look at the
0:01:43   forecast we have today so they're all very positive for the 2021. So the LSE research I see inside
0:01:51   the uh forecasting growth in 2021 between 19 and 20% W. S. D. S. Is a bit more reluctant but that's
0:02:01   an old one from december. Also the garden one is a bit old so they're a bit lower. They will
0:02:07   probably update going forward. So besides just internet you have a big demand of rollout of five G.
0:02:15   Mobile uh phone communication and also uh drive for automotive. So if you follow older um automotive
0:02:27   companies are now competing and launching launching new type of infotainment systems for their cars.
0:02:34   So if you look into devices where what does it mean and how does this relate to L. D. And CVD
0:02:41   processes? So over the past 15 years or so? Uh it has been a tremendous growth of L. D. Processes in
0:02:50   the semiconductor industry. So first of all, the implementation of new high K materials for Iran,
0:02:57   which took place around about 2004, followed by logic 2007. And then the transition from two D nine
0:03:06   devices to three D. Nand has been again for a lot of new CVD process space and also A and D. Of
0:03:14   course kicking out other technologies activity spin on the electrics and so on. So we see that the
0:03:22   engine in this uh that's pulling on. Uh the need for L. D. And C. V. The equipment precursor
0:03:31   materials and the whole supply chain for the flaps is for leading edge logic. So everything today
0:03:37   that's below 20 nanometer has a tremendous amount of daily process steps. There are some comparisons
0:03:44   out there. There's a good one bye from a webinar from tech inside this spring showing uh, if
0:03:51   comparing notes, like the intel with founder notes at 10 and seven nanometer. Uh, it's just a
0:03:59   tremendous amount of a leap processes. It's like more than 50 LD process that approaching 80 just
0:04:06   for logic devices, the same trend is going on for the Iran and three D. Nand. So this this is what
0:04:14   the driver in this industry um, and makes the L. D. Equipment market civilly equipment market uh
0:04:22   growing year on year. Uh and of course also precursors gases goes into this more to that to come. So
0:04:31   if you look ahead so we are now the event of thin fat happened um Which was a happy event for L. D.
0:04:39   A lot of new process steps not only related to the high K. Metal gate stack itself but also in the
0:04:47   patterning. So in order to make advance if in fact you need some type of uh double patterning,
0:04:55   quadruple patterning. If you rely on immersion lithography which has been the case until uh 10
0:05:02   nanometer inter node and seven nanometer foundry node where we have the transition to use a
0:05:08   combination of some layers with you the uh patterning and some with emotion and all types of trick
0:05:16   of doing multiple patterning. So spaces defined double patterning, quadruple pattern and combination
0:05:22   of repeating lithography exposure and national tipple time. The so called little actually to
0:05:28   actually touch technology and this is going forward. So now they are interesting time. Um uh so if
0:05:37   you look at the technologies that are presented out there for three nanometer or two nanometer
0:05:41   technologies, there will be architectural change going from the thin fat. So you have a film coming
0:05:48   up to get all around transistor technology there the fin is reshaped into up to three individual non
0:05:57   wires uh informing the new architecture for the transistor. And here you can imagine there's still
0:06:05   uh need of L. D. You have to conform to coat the Shannon's, the silicon Shannon's that are high in
0:06:12   openness with the high K. Metal gets stuck. You need to connect to them. It's all get tighter packed
0:06:17   and going ahead in the future. Looking beyond five years, you will most probably see some sort of
0:06:24   stacking technology going up in the cell dimensions, like you've been seen happening for uh three D
0:06:30   nand is in discussion also for D RAM. So it will definitely remain exciting for L. D. N C V. D. For
0:06:40   many years to come. And everybody's uh expecting continued growth. So not only related to that, the
0:06:48   number of wafers that are produced goes up, but you also have the drive that you have new
0:06:52   applications, new patterning technology that more and more rely on ale, the R. A selective
0:06:58   deposition, atomic layer etching and this type of advanced atomic level processes. So if you look
0:07:07   then more in detail on the logic. So how is it split up? So you start with the fin which will
0:07:14   survive most probably through the third three nanometer. Note some may switch earlier. And then you
0:07:20   have this transition taking place at going from 3 to 2 nanometer where the uh non wire transistor
0:07:28   will get all around. Uh, the feds comes in or nano sheets as the industry now starts to call it.
0:07:34   Then there it will continue the development. So I make is working on new designs going forward. So
0:07:42   the fork sheets could come after non shit where you can go below the five T. Uh and other things
0:07:52   that comes is uh, metal ization, which will have to change uh when it gets densely packed and also
0:07:59   higher aspect ratio, uh, contacts to the contact level is getting tight. And this is a great
0:08:05   opportunity of course for conforming deposition methods like C. V D N A N D. And if you want to look
0:08:13   as far as one on a meter, we have mm has presented the Good Daughter on two D. Shannon material
0:08:20   tanks than disqualified. There's other materials presented out there uh, based on molly or other
0:08:28   metal to the materials we have TSMC and there are a couple of universities recently presented
0:08:36   functional uh one on a meter uh, technology based on two D. Shannon materials. And we expect more to
0:08:44   come. So if you look at three D nand so here the scaling races not more tighter, tighter it's higher.
0:08:53   Higher. So this type of skyscraper architecture and there are some infliction points here to look at
0:09:01   which drives the need for more in the N. C. D. Process equipment. And that is that there is you
0:09:08   can't go on stacking forever. You have to run this module twice or three times and every time you
0:09:14   have to run a model and repeated. It means not only more precursors are needed in production but
0:09:21   also more equipment that drives the equipment industry for more invests into the fabs. Whereas
0:09:27   lithography in this case, since it's stop scaling in the lateral direction remains with you can
0:09:34   solve all the problems by using the well developed tricks with emotion and uh double patterning for
0:09:43   ripple pattern and these types of technologies no real need to go for UV for three D. Nine. But you
0:09:49   have to remember this is a lot of wafers out. There is a big part of the total 300 millimeter
0:09:55   production globally. And it all ends up one day in your laptops, in your phones, in your tablets and
0:10:01   in daughters dollars. So as local uh storage media. So uh the room has been for a couple of years,
0:10:13   depends on who you ask and so less exciting. But suddenly a lot of things happen also in the room.
0:10:19   So you have two things, the big one, UV lithography, uh, the top three uh and dominating companies,
0:10:31   some soon microphone sk hynix has uh um are going to be patterning for the room. So they have come
0:10:38   now down and below the one zet notes. So they you know, they got a big problem with the note naming.
0:10:47   So like for three X. Uh this is old three X. Waver from Qimonda with rossini Monitor the development
0:10:57   way for uh the last one that was technologies made at Qimonda. Since then they went down to two X.
0:11:04   Technology to Y. And then we have the one Xy set and beyond this. Uh there's a need of E. V. But you
0:11:12   see that the dimensional scaling is flattening out. So there's a lot of architectural alternatives
0:11:18   going in the third dimension here. That being presenting now. But there's nothing out in the field
0:11:25   yet of that interesting for L. D. Of course is that until this point uh the Deer and select
0:11:33   transistors was based on uh basically policy on old school technology. Uh But now there has been
0:11:41   confirmed that some soon um and also Sm has confirmed that in the public releases that for the
0:11:50   latest DDR five products from Samsung has actually L. D. High K. Metal gate stack on it. So that's a
0:11:57   huge win for that market because uh it only comes one this process, but there's a lot of L. D.
0:12:05   Involved in the gate stack. It's not only, you know the halftime oxide layer, you also may need to
0:12:11   touch the interface, you may need to dope to have um oxide with something like a lantern on like you
0:12:16   do in logic. Uh when you do the transistors that you need to be able to separate and anti most you
0:12:23   have different work function methods, you have it stops and so all uh technology that's usually
0:12:28   taken care of by L. D. So it's a big number of Chambers has to go out there if the big companies
0:12:34   like Samsung and Sk Hynix and Micron decides to go with it. Uh So that looks pretty good for those
0:12:42   companies that are in these games. And also the precursor surprise. Of course. Yeah, it's not only
0:12:50   the big companies, there's also, you know, smaller time in these different companies like Nanya
0:12:55   Winbond. Zonana has also announced investment planned investments in Evil Photography. So dear and
0:13:02   will remain interesting. Uh Other things that is interesting is that uh even that china uh market is
0:13:12   trailing both technology for their um flesh and logic. There's a lot of L. D. And C. V. D.
0:13:21   Implementation taking place in the chinese foundries or S M. I C. Uh 14 nominative in fact, you
0:13:29   can't make of in fact technology without a lot of L. D. Processes. And usual suspects of pre process
0:13:36   maybe it's not like eight LD processes, but they need a big share of at least 2025 led processes to
0:13:43   do the front and um for that. And this is done uh boosting maybe the local the chinese equipment
0:13:51   manufacturers, you have at least three uh serious uh equipment manufacturing china's or a mech
0:13:59   Campanini. Uh Nora and one more. And they have all advanced process equipment aiming at a market and
0:14:13   look the chinese junks. The memory company also have three D nand technology using 64 layer here as
0:14:20   pictures. It's uh not the most advanced but it's getting there. I mean, the other manufacturers has
0:14:26   96 layers. China is catching up slowly have 64 layer technology. It's a lot of LD going into that as
0:14:33   well to do the, all the layers that has to be within the owner device, the electrodes and so on. A
0:14:42   lot of times than uh, CD LP proceed. So let's look at quickly at some other markets. Uh, foldable
0:14:50   tax, uh did not get hit so much by the pandemic. Didn't go down, but it didn't, it still has a good
0:15:01   growth in last year. And and if you look back, you see it's a lot of growth going back the past 10
0:15:07   years from 2010 in this market. Its uh overall, something like uh 14% annual growth. Now may slow
0:15:19   down a bit to the latest projections to going down to five year forecast of 8.5 kg are uh and here,
0:15:25   of course, from a deep perspective, what's interesting is the backside preservation with aluminum
0:15:30   oxide. It's basically a market that mainly take place in china, but there's also some new solar
0:15:40   perhaps being announced different places in europe in Germany and north America requiring a li
0:15:46   equipment for personal. Uh uh It's a quick look at the display uh seems that people were happy
0:15:55   looking at their laptop uh instead of buying a new big uh T. V. At home in the living room because
0:16:06   the most markets went down during the pandemic. But there is already some recovery uh seen. So
0:16:15   display market is going up but it lost overall 10% during the pandemic. So if you look specifically
0:16:22   for LED displays, the micro elegies and are the type of uh nano integration where there is
0:16:29   opportunities also for LD processes or but on a smaller emphasis. So this is not happening at uh 300
0:16:36   millimeter. It's as you know, 200 millimeters six inch wafers in this type of wafers. And there was
0:16:44   also hit because it's display related by uh pandemic uh but seems to be in recovery. I don't have
0:16:53   the latest daughter for the last quarter, but it seems to be back on track, flat panel displays.
0:16:59   Again, these are more all types of displaced, not specifically for mobile or laptops. Uh But it's
0:17:10   maybe not aiming its for the L. C. D. Market. And some lady Olave market forecast is good growth but
0:17:18   was a bit uh flattened as well during the pandemic. And if you look at the demand for large areas
0:17:27   supply, it's steady going forward. If you believe the forecast going from all the way until 2022, so
0:17:36   6% growth. Uh many opportunities for plasma CVD um and also l the opportunities in display. So by
0:17:48   that I will now give a more material focused update on the electronic gas market followed by L. D.
0:17:55   And 70 precursors. So the overall market has uh Gross on a regular basis by at least typically 56%
0:18:05   every year. So if you look at the division we make a text that is between bulk gases and specialty
0:18:12   gases to the bulk gases. Is more dependent on a lot of other industries, uh Not semiconductors or
0:18:20   industrial manufacturing, medical industry. Uh So use a lot of bulk gases like oxygen, nitrogen, uh
0:18:28   hydrogen and the energy markets also of course and specialty gases. This is verifying your typical
0:18:34   process gases that used for advanced etch CVD plus massive E. D. And L. D. And doping materials.
0:18:41   More details on that to come. So this this is a market that is heavily uh driven by the
0:18:48   semiconductor and electronic industry. And this is also why there is a higher growth threatened in
0:18:55   this market. So if you look at the five year kg are going forward, it's about 7.6% according to our
0:19:00   projections. And to compare with that, you have a general growth rate for the same market. 5 to 11%.
0:19:07   The photovoltaic market about 8.5. And flat panel display is 4.3. So you see here uh that
0:19:15   semiconductor definitely have the strong impact on this market. So what gases are used. And so if
0:19:23   you don't look, you know, I know most people are interested in, you know, the metal precursors to
0:19:27   silicon progress and so on. But there's a lot of gas is being used in alien 70 processing. And it's
0:19:33   also you know preferred, it's easy to hook up and you can have a big supply of it. And some can even
0:19:39   be manufactured locally in big air separation units. So you have in all the carrier gases used like
0:19:45   to have your inert gas pulse in L. D. Side, nitrogen organ can be out of gases in other special
0:19:52   processes. Then you have a big one for sure. Thanks. And hexafluoride um used for all types of
0:20:00   Pakistan contacts and uh utilization applications. Uh Then you have dope plants. So you know you
0:20:09   need N. And P. Masindi your device, you need to dope it. You can use our scene for scene Deborah,
0:20:16   you can do if you grow any type of nitrate metal nitrates, uh other nitrates you need ammonia. Uh
0:20:26   It's big need then have a bunch of these other gases that are mainly for edge. You know the floor
0:20:34   nated uh gases, uh carbon monoxide, carbon dioxide, the rare gases like helium, helium seen on
0:20:44   krypton. But there's a lot I tell you there's a lot you can learn from the edge guys. So, uh,
0:20:53   initially you 10 if you go into plasma, you maybe use like uh, nighttime plasma oxygen plasma and
0:21:00   you don't think about the other components started tricks you can do with the plasma that the excess
0:21:04   has figured out long time ago. So by controlling the physical component of if you want to activate
0:21:11   your process physically more, you can pick the right ions in I note iron, so you can have light
0:21:17   helium or you can go for something heavier like krypton seen on for instance. And you can do a lot
0:21:22   of interesting tricks also in plasma LD by doing so. And of course in that activity. So it's a big
0:21:29   varity of gases and you see most of them found a home in the semiconductor industry display industry
0:21:36   don't use as many. And solar has reduced amount. And then, yeah, medical, it's mainly the bulk gases
0:21:43   and somewhere gases and the aerospace and automotive is also less diverse. So, uh, and it's not as
0:21:51   simple that you just use these gases. It's also, you know, the secret source. Each manufacture use
0:21:57   their own mix. So they can be processes out there that use 10 different gases to etch high
0:22:04   expectations structures in three D nine for instance, because you have to go through those
0:22:09   dielectric stacks, you switch between different direct tricks and, but you still have to go down and
0:22:14   you have to do it in three day and you have effects that becomes stronger as deep you go and there's,
0:22:20   you don't only use the hardware to do all the tricks in the book. You also used the gas mixture and
0:22:24   continuously change the gas mixture. Uh, it's a time control in the process what gas you use and
0:22:31   when. So if you look at the big picture, the big gas companies that this market is, you know, for
0:22:38   semiconductors, the Tier one man, if gas suppliers like they had a big event linda and practice are
0:22:45   decided to march, none of these companies were really too much into L. D. And CVD precursors, but
0:22:53   has been that on and off through the times. Um, and this created a lot of room for the smaller
0:23:01   competitors to pick up some of the divestment as that this merger led to, so to not end up with big
0:23:08   monopoly situations across the globe. So we have seen that ionic concerns semester our water has
0:23:15   entered the U. S. And european union markets due to this, it has been beneficial in that way. A lot
0:23:22   of activities in china uh, from gas companies. So you have both the state owned companies and
0:23:29   privately owned companies. We can tell you more about that if you are interested. And let's go to
0:23:38   what you've all been waiting for and save the good stuff to last LDN CBD precursors. So what are the
0:23:46   challenges? So as I mentioned in the beginning the deposition has uh segment which is a big part of
0:23:54   the semiconductor equipment market correspondent to almost 22%. So you see that you have the three
0:24:01   big segments or lithography is and lithography. You find you know a SML Canon Nikon three big
0:24:07   companies. SML is number one due to the lithography uh H and clean here March. So it's both a
0:24:15   reactive ion etching and other type of clean equipment. And deposition with consists of CVD as the
0:24:22   biggest segment followed by L. D. Followed by T. V. D. And then you have plating and spin on
0:24:28   dielectric and some other segments that related to them. So CVD is the big one and you can see
0:24:38   growth in this segment. So it's uh not that it's getting smaller overalls, deposition is
0:24:44   increasingly important here by year. And this is driven by the uh I'm a number of new materials
0:24:51   entering uh semiconductor manufacturing. So uh if you go like early 2000 you didn't have too many
0:25:01   different materials. You had you know silicon oxide, silicon nitride, different types of silicon.
0:25:06   You know you had uh amorphous silicon uh you had polio, you had uh episode silicon and so on. And
0:25:14   then from utilization aluminum thanks to uh copper mainly and some barrier materials like thai
0:25:21   nitrite and nitrate. Maybe some cobalt also but and some silly sides maybe I forgot something but
0:25:29   that was the pictures since then. You know what has happened. L. D. Enter the game. We have half
0:25:34   noon have um oxide, zirconium oxide length and um oxide in high volume manufacturing a lot of cobalt
0:25:42   growth form utilization. The basically the the lower metal ization levels for uh leading edge logic
0:25:51   is now becoming dominated by solutions by cobalt. So either just various it or the complete
0:25:57   utilization, the plug, the context. There is some new materials entering here within um and
0:26:05   molybdenum. However, that's at the moment in some sort of floating barriers between R. And D. And
0:26:13   pilot ready to go I would say for long. But there are some issues to be solved. It'd relate to
0:26:19   cleaning cmp and all these other processes that you see in the other segments there that you need to
0:26:25   actually do successful device integration. So
0:26:32   so if you look at first hike metal and high case of difficult. So so this is where you find aluminum
0:26:38   dominating. But I am a uh some new uh market share from aluminum chloride. So there's some reasons
0:26:45   that you want to get rid of T. M. A. One is that it is a bit dangerous to handle. And the other one
0:26:51   is that aluminum chloride typically have better electrical performance. Uh lantern um has moved in.
0:26:57   So all it was doped into the stacked with T. V. D. But going to feel fat treated design. Uh Many
0:27:03   companies will switch to do, it actually is a couple of cycles of uh led lantern walk side that is
0:27:08   then driven into the coffin of oxide and it saturates all the dangling bonds in half marks. And you
0:27:14   get a great reliability Cecconi um every day. Oh, United in the ram rossini. Um how to measure how
0:27:21   big this market is because it's not really uh in high volume as proven by reverse engineering yet.
0:27:27   But if it would be uh to come, it would be a decent market due to the high price of routine um
0:27:33   simply coupled, as I mentioned, is growing also relative expensive precursor. And we see here that
0:27:40   this is a TB precursor has taken over and it's now about 90% of the total market has compared to the
0:27:48   cocoa cp molecule, uh, titanium used in the Iran for electrodes, it's used in the gate stack for
0:27:57   tonight. Right? It can I'd ability the mathematical mostly. Pt matt is a very good barrier for
0:28:04   tantalum nitride barriers for corporate diffusion. It's still in use and will continue to use so um
0:28:10   for a long time because this logic processes just keep on uh finding new markets and new customers
0:28:18   and big investments. They will not go away. Um and thanks to uh it's used everywhere and
0:28:25   increasingly so when you do three D. Devices and still use dancing contact, we may see some
0:28:30   replacement here with morley but it has not happened yet. General good growth in this market. 8%
0:28:36   forecast at kg are um if you look at Dilek tricks, the growth forecast is slightly lower but still
0:28:45   good 6.1%. And here we have many processes that are related to patterning. So double patterning for
0:28:53   triple patterning where you can use molecules like B. D. S deepest depending on who you buy from and
0:29:00   what's called um uh For the dielectric stack in three D nand, you have a lot of plasma activity
0:29:09   relying on precast like H C D s T. Say that the bus is a big uh it's not the biggest segment but
0:29:18   it's sort of uh evergreen segment of its own. And chaos is also one of these uh segments that will
0:29:27   probably always exist to never go away. And then there's also in the bottom there you see a big a
0:29:34   big segment of spin on dialectics which which is used in the Metal ization and in the back back end
0:29:40   of line and also in back end of course. Uh so I'll be finished now uh sort of running out of time
0:29:48   but I want to say something about the environment and there's a lot of gas is bad guesses that are
0:29:55   there. They're mainly used in this case for etching. You know, the real bad guys with a high uh C.
0:30:03   02 excellent performance. Um So SF six, NF three and C four and they are constantly increasing in
0:30:11   our atmosphere. And the semiconductor industry there are studies has a contribution about 2% to
0:30:19   discuss. It. Maybe not sounds too much this other than to reverse, but you know, semiconductor
0:30:23   industry has a high growth cuts. If it's 2% today go 10 years ahead and this uh you know the climate
0:30:30   projections go 50 years ahead. Uh Semiconductor will definitely one of the media or contributors is
0:30:36   now and it's not only the ceo to equivalent gases that are the greenhouse gases causing prominent
0:30:44   also energy demands. Uh This is based on a study presented recently by I make it I. D. M. 2020 in
0:30:51   san Francisco. Uh So they calculated the energy consumption for each logic notes. So you can see 28
0:30:57   nanometer going, you know, 14 75 9300, 200 so on. You see how the energy demand uh Left axis. Uh
0:31:07   This one this one uh it goes up for each note uh and this seems to be no end to it. Uh, see you to
0:31:15   output emissions from process also goes up. This um, doesn't look so good. So, you know, you have
0:31:22   the underlying production number of wave starts are going up, demand is huge. Uh, the emissions and
0:31:29   electrical consumption goes up. There's starting to be even on the island of Taiwan, a problem that
0:31:36   TSMC by introducing E V now is using something like 5% of the total uh, production of electricity on
0:31:46   the island. So this is definitely a topic to, to look at and something that we also camera takes it.
0:31:51   So by that I'm done, I will thank you very much. Sorry for going to minutes over. Maybe the
0:31:58   organizers can cut out those and if you want to contact me, get in touch with tax it um, info dot
0:32:04   text that we have reports on precursors, c V A L D and gases. We also do custom studies for anything
0:32:12   that's out there. Thank you so much.